Search results for "Electron beam-induced deposition"

Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: protective capping of metallic iron structu…

2011

We report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3 nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L₃ edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon e…

A Scanning Electron Microscope for Ultracold Atoms

2006

We propose a new technique for the detection of single atoms in ultracold quantum gases. The technique is based on scanning electron microscopy and employs the electron impact ionization of trapped atoms with a focussed electron probe. Subsequent detection of the resulting ions allows for the reconstruction of the atoms position. This technique is expected to achieve a much better spatial resolution compared to any optical detection method. In combination with the sensitivity to single atoms, it makes new in situ measurements of atomic correlations possible. The detection principle is also well suited for the addressing of individual sites in optical lattices.

Peculiarities of imaging one- and two-dimensional structures in an emission electron microscope. 1. theory

2000

Local changes in work function cause deviations of the electrical microfield near a sample surface as a result of the uniform accelerating field distribution between the sample (cathode) and the extractor electrode (anode). This results in a change in the electron trajectories. As a consequence, the microscope image shows remarkable changes in position, size, intensity and lateral resolution of distinct details, which can be quantitatively described by the calculations presented here. Analysing these effects in the image gives an opportunity to determine the real lateral size of the observed structures and the distribution of local contact potentials.

Dopant Contrast in Semiconductors as Interpretation Challenge at Imaging by Electrons

2007

Mechanisms responsible for the contrast between differently doped areas in semiconductors, which is observed in electron micrographs, is discussed as regards the key factors determining the sign and magnitude of the contrast. Experimental data obtained by means of the scanning electron microscope (SEM), scanning low energy electron microscope and photoelectron emission microscope are reviewed together with hints following from them for compilation of a model of the contrast mechanism.

In situ study of the sintering of a lead phosphovanadate in an Environmental Scanning Electron Microscope

2011

cited By 3; International audience; The in situ sintering of a powder of Pb3(VO4) 1.6(PO4)0.4 composition was performed in an Environmental Scanning Electron Microscope. The electric current induced by the electron beam was found to reduce the effective temperature of sintering as well as to accelerate the kinetics of shrinkage of a cluster composed of sub-micrometric grains of material. The presence of the residual current flow in the cluster during observation for in situ experiments helps to reduce the apparent sintering temperatures from 50 to 150 °C compared to conventional heating conditions without current. © 2011 Elsevier B.V. All rights reserved.

Electron microscopic investigations on amorphous polycarbonate

1967

Artificial granularity in two-dimensional arrays of nanodots fabricated by focused-electron-beam-induced deposition.

2010

We have prepared 2D arrays of nanodots embedded in an insulating matrix by means of focused-electron-beam-induced deposition using the W(CO)(6) precursor. By varying the deposition parameters, i.e. the electron beam current and energy and the raster constant, we obtain an artificial granular material with tunable electrical properties. The analysis of the temperature dependence of the conductivity and of the current-voltage characteristic suggests that the transport mechanism is governed by electron tunneling between artificial grains. In order to understand the nature of the granularity and thus the microstructural origin of the electronic transport behavior, we perform TEM and micro-Raman…

Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

2019

This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication.